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Capacitive ultrasonic transducer, production method thereof, and capacitive ultrasonic probeUSPTO Application #: 20070164632Title: Capacitive ultrasonic transducer, production method thereof, and capacitive ultrasonic probe Abstract: It becomes possible to obtain high sound pressure in a high frequency domain by a capacitive ultrasonic transducer which comprises a membrane on which one electrode is formed, a cavity constructed in its backface, and a substrate on which these are mounted and supported and on whose surface an electrode is provided, on a surface in an ultrasonic transmission and reception side, characterized in that the membrane comprises two or more layers, and at least one layer of them comprises a high dielectric constant film. (end of abstract) USPTO Applicaton #: 20070164632 - Class: 310311000 (USPTO)
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