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Advanced Energy Industries, Inc. patents

The following is a sampling of recent Advanced Energy Industries, Inc. patent applications (USPTO Patent Application #, Patent Title) sorted by month.

August 2012 - Advanced Energy Industries, Inc. patents

20120217221 - System, method and apparatus for controlling ion energy distribution of a projected plasma
20120218042 - Method and apparatus for modifying the sensitivity of an electrical generator to a nonlinear load

July 2012 - Advanced Energy Industries, Inc. patents

20120187844 - Electrostatic remote plasma source
20120188007 - Impedance-matching network using bjt switches in variable-reactance circuits
20120171390 - Methods and apparatus for sputtering using direct current

May 2012 - Advanced Energy Industries, Inc. patents

20120112815 - High frequency solid state switching for impedance matching

April 2012 - Advanced Energy Industries, Inc. patents

20120091817 - System, method, and apparatus for ac grid connection of series-connected inverters

March 2012 - Advanced Energy Industries, Inc. patents

20120074506 - Semiconductor package for higher power transistors
20120052599 - Wafer chucking system for advanced plasma ion energy processing systems

March 2011 - Advanced Energy Industries, Inc. patents

20110061841 - Temperature insenstive mass flow controller
20110054702 - Multi-mode control loop with improved performance for mass flow controller

June 2005 - Advanced Energy Industries, Inc. patents

20050134186 - Stabilizing plasma and generator interactions



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