Follow us on Twitter
twitter icon@FreshPatents

Browse patents:
Next
Prev

Film-forming apparatus and film-forming method / Sony Corporation




Film-forming apparatus and film-forming method


There is provided a film-forming apparatus including a roll-to-roll mechanism and a heating unit. The roll-to-roll mechanism is configured to transport a film-forming target and includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target. The heating unit is configured to heat the film-forming target transported by the roll-to-roll mechanism.



Browse recent Sony Corporation patents


USPTO Applicaton #: #20170058398
Inventors: Toshiyuki Kobayashi, Keisuke Shimizu, Koji Kadono, Yukiko Mizuguchi, Yosuke Murakami


The Patent Description & Claims data below is from USPTO Patent Application 20170058398, Film-forming apparatus and film-forming method.


CROSS-REFERENCE TO RELATED APPLICATIONS

- Top of Page


The present application is a continuation application of U.S. patent application Ser. No. 14/402,244, filed Nov. 19, 2014, which is a National Stage of PCT/JP2013/002772, filed Apr. 24, 2013, and claims priority to Japanese Patent Application No. 2012-124321 filed on May 31, 2012, the entire content of which is hereby incorporated by reference.

TECHNICAL FIELD

- Top of Page


The present disclosure relates to a film-forming apparatus and a film-forming method that use a roll-to-roll system.

BACKGROUND

- Top of Page


ART

A film-forming process using a roll-to-roll system is for transporting a film-forming target (metallic foil or the like) by winding the film-forming target from an unwinding roll to a winding roll and for forming a thin film on the film-forming target during the transport. The roll-to-roll system allows a large-sized film-forming target to be transported, which is suitable for mass production of thin films.

For example, Patent Literature 1 discloses “a graphene roll-to-roll coating apparatus” that transports a metallic member by a roll-to-roll system and forms a graphene film on the metallic member.

CITATION LIST Patent Literature

[PTL 1]

Japanese Patent Application Laid-open No. 2011-162877

SUMMARY

- Top of Page


Technical Problem

However, in the film-forming process using the roll-to-roll system as described in Patent Literature 1, there may be a case where a film quality is deteriorated due to a tensile force applied to a film-forming target by the roll-to-roll system, as compared to a film-forming process in which the roll-to-roll system is not used.

In view of the circumstances as described above, it is desirable to provide a film-forming apparatus and a film-forming method that are capable of producing a high-quality thin film by using a roll-to-roll system.

Solution to Problem

According to an embodiment of the present disclosure, there is provided a film-forming apparatus including a roll-to-roll mechanism and a heating unit.

The roll-to-roll mechanism is configured to transport a film-forming target and includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target.

The heating unit is configured to heat the film-forming target transported by the roll-to-roll mechanism.

With this configuration, the tensile force applied to the film-forming target is relaxed by the roll-to-roll mechanism. Therefore, it is possible to prevent a film quality from being deteriorated due to deformation (plastic deformation and twinning deformation) of the film-forming target by the tensile force.

The tensile force relaxation unit may include a pinch roll configured to sandwich the film-forming target.

With this configuration, it is possible to prevent the tensile force associated with winding and unwinding of the film-forming target by the roll-to-roll mechanism from being directly applied to the film-forming target by the pinch roll sandwiching the film-forming target, that is, to relax the tensile force applied to the film-forming target.

The pinch roll may include a guide roll configured to guide transport of the film-forming target and an elastic roll having a roll surface made of an elastic material, and the elastic roll may be pushed by the guide roll such that the film-forming target is sandwiched between the elastic roll and the guide roll.

With this configuration, by a frictional force of the elastic roll that rotates in conjunction with the guide roll, sliding of the film-forming target with respect to the guide roll is prevented, and the tensile force associated with winding and unwinding of the film-forming target by the roll-to-roll mechanism can be prevented from being directly applied to the film-forming target.

The tensile force relaxation unit may include a multiple-stage roll including a plurality of rolls.

With this configuration, it is possible to gradually relax the tensile force applied to the film-forming target by the multiple-stage roll. In the case where the tensile force of the film-forming target is relaxed at one spot, there is a fear that a large gradient of the tensile force is caused at that spot and the film-forming target slides, for example. According to this configuration, such a large gradient of the tensile force can be prevented.

The film-forming apparatus may further include a slack detection sensor configured to detect an amount of slack of the film-forming target. The tensile force relaxation unit may be configured to adjust the tensile force applied to the film-forming target in accordance with an output of the slack detection sensor.

With this configuration, the slack detection sensor can detect an amount of slack of the film-forming target, the slack being caused by relaxation of the tensile force applied to the film-forming target. The tensile force relaxation unit can adjust the tensile force applied to the film-forming target in accordance with the amount of slack of the film-forming target so that the tensile force can fall within an appropriate range.

The tensile force relaxation unit may be configured to relax the tensile force applied to the film-forming target to be equal to or smaller than a tensile force at which twinning deformation occurs in the film-forming target.

A specific metal species (copper or the like) causes twinning deformation when a tensile force is applied in a state of being heated. In the twinning deformation, the orientation of crystal is partially changed in metal crystal. The inventors of the present disclosure have found that the twinning deformation also occurs at a tensile force smaller than that of plastic deformation and the twinning deformation also inversely affects a film quality. Therefore, the tensile force relaxation unit relaxes the tensile force applied to the film-forming target to be a tensile force or lower, at which twinning deformation occurs in the film-forming target. Thus, the film quality can be prevented from being deteriorated due to the twinning deformation.

The film-forming target may include a metallic foil containing copper, and the tensile force relaxation unit may be configured to relax the tensile force applied to the film-forming target to be smaller than 1 MPa.

Heated copper (for example, 950 degrees) causes plastic deformation at a tensile force of about 8.3 MPa. However, the twinning deformation also occurs at a further lower tensile force of about 1 MPa. Therefore, in the case where the film-forming target is a metallic foil containing copper (including copper alloy), a tensile force applied to the film-forming target is relaxed to smaller than 1 MPa (more desirably, smaller than 0.1 MPa). Thus, the deterioration of the film quality due to the twinning deformation of copper can be suppressed.

The film-forming apparatus may further include a film-forming material supply unit configured to supply a carbon source substance containing carbon to the film-forming target heated by the heating unit.

When a carbon source substance (methane or the like) is supplied to a heated film-forming target (metallic foil containing copper), the carbon source substance is discomposed and a graphene film is formed on the film-forming target. It has been found that twinning deformation of copper may occur as described above at a graphene production temperature (for example, 950 degrees) and when the twinning deformation occurs, the quality of a graphene film (electric characteristics or the like) is lowered. In the present disclosure, as described above, the tensile force applied to the film-forming target is relaxed so that the twinning deformation of copper is prevented from occurring. Therefore, the deterioration of the quality of a graphene film due to the twinning deformation of copper can be prevented, and thus high-quality graphene can be produced.

According to another embodiment of the present disclosure, there is provided a film-forming method including: setting a film-forming target in a roll-to-roll mechanism; transporting the film-forming target by the roll-to-roll mechanism; supplying a film-forming material to the film-forming target; and heating the film-forming target in a state in which a tensile force applied to the film-forming target is relaxed by the roll-to-roll mechanism.

According to the film-forming method, the film-formation is performed in a state where the tensile force applied to the film-forming target is relaxed by the transport of the film-forming target by the roll-to-roll mechanism. Therefore, the deterioration of a film quality due to deformation of the film-forming target can be prevented, and thus a high-quality thin film can be produced.




← Previous       Next →

Download full PDF for full patent description, claims and images

Advertise on FreshPatents.com - Rates & Info


You can also Monitor Keywords and Search for tracking patents relating to this Film-forming apparatus and film-forming method patent application.

###


Browse recent Sony Corporation patents

Keyword Monitor How KEYWORD MONITOR works... a FREE service from FreshPatents
1. Sign up (takes 30 seconds). 2. Fill in the keywords to be monitored.
3. Each week you receive an email with patent applications related to your keywords.  
Start now! - Receive info on patent apps like Film-forming apparatus and film-forming method or other areas of interest.
###


Previous Patent Application:
Film system and method of forming same
Next Patent Application:
Filter assembly for providing purified air
Industry Class:

Thank you for viewing the Film-forming apparatus and film-forming method patent info.
- - -

Results in 0.04914 seconds


Other interesting Freshpatents.com categories:
Software:  Finance AI Databases Development Document Navigation Error

###

Data source: patent applications published in the public domain by the United States Patent and Trademark Office (USPTO). Information published here is for research/educational purposes only. FreshPatents is not affiliated with the USPTO, assignee companies, inventors, law firms or other assignees. Patent applications, documents and images may contain trademarks of the respective companies/authors. FreshPatents is not responsible for the accuracy, validity or otherwise contents of these public document patent application filings. When possible a complete PDF is provided, however, in some cases the presented document/images is an abstract or sampling of the full patent application for display purposes. FreshPatents.com Terms/Support
-g2-0.3194

66.232.115.224
Browse patents:
Next
Prev

stats Patent Info
Application #
US 20170058398 A1
Publish Date
03/02/2017
Document #
15342338
File Date
11/03/2016
USPTO Class
Other USPTO Classes
International Class
/
Drawings
8


Heating Unit Relaxation

Follow us on Twitter
twitter icon@FreshPatents

Sony Corporation


Browse recent Sony Corporation patents





Browse patents:
Next
Prev
20170302|20170058398|film-forming apparatus and film-forming method|There is provided a film-forming apparatus including a roll-to-roll mechanism and a heating unit. The roll-to-roll mechanism is configured to transport a film-forming target and includes a tensile force relaxation unit configured to relax a tensile force applied to the transported film-forming target. The heating unit is configured to heat |Sony-Corporation
';