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Method and apparatus for determining a measure of a thickness of a polishing pad of a polishing machine




Title: Method and apparatus for determining a measure of a thickness of a polishing pad of a polishing machine.
Abstract: An apparatus for determining a measure of a thickness of a polishing pad of a polishing machine includes a detector and a determiner. The detector is configured to detect a position of a carrier of an element to be polished in a pressing direction while the element is pressed by the carrier in the pressing direction against the polishing pad with a defined pressure. The detector is further configured to output a signal indicative of the position of the carrier. The determiner is configured to determine the measure of the thickness of the polishing pad based on the signal indicative of the position of the carrier. ...


USPTO Applicaton #: #20130017762

The Patent Description & Claims data below is from USPTO Patent Application 20130017762, Method and apparatus for determining a measure of a thickness of a polishing pad of a polishing machine.




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stats Patent Info
Application #
US 20130017762 A1
Publish Date
01/17/2013
Document #
File Date
12/31/1969
USPTO Class
Other USPTO Classes
International Class
Drawings




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20130117|20130017762|determining a measure of a thickness of a polishing pad of a polishing machine|An apparatus for determining a measure of a thickness of a polishing pad of a polishing machine includes a detector and a determiner. The detector is configured to detect a position of a carrier of an element to be polished in a pressing direction while the element is pressed by |
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