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Vibrating mirror element

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Vibrating mirror element


This vibrating mirror element (100) includes a mirror portion (10), a first driving portion (41), being cantilevered, including a first fixed end (41a) formed on a first side of a first direction and a first free end (41b) formed on a second side thereof, and linearly extending, a first mirror support portion (46) capable of supporting the mirror portion (10) in an inclined state, a second driving portion (51), being cantilevered, including a second fixed end (51a) formed on the second side of the first direction and a second free end (51b) formed on the first side thereof, being point-symmetrical to the first driving portion with respect to the center of a mirror, and linearly extending, and a second mirror support portion (56) being point-symmetrical to the first mirror support portion with respect to the center of the mirror and capable of supporting the mirror portion in an inclined state.

Browse recent Funai Electric Co., Ltd. patents - Osaka, JP
Inventors: Isaku Kann, Hidetoshi Kotera, Manabu Murayama, Naoki Inoue
USPTO Applicaton #: #20120320441 - Class: 3592241 (USPTO) - 12/20/12 - Class 359 


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The Patent Description & Claims data below is from USPTO Patent Application 20120320441, Vibrating mirror element.

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TECHNICAL FIELD

The present invention relates to a vibrating mirror element, and more particularly, it relates to a vibrating mirror element including a driving portion.

BACKGROUND ART

In general, a vibrating mirror element including a driving portion is known. Such a vibrating mirror element is disclosed in Japanese Patent Laying-Open Nos. 2009-169290 and 2007-188073, for example.

In the aforementioned Japanese Patent Laying-Open No. 2009-169290, there is disclosed an optical deflector including a pair of driving portions arranged along a direction X, a mirror portion arranged to be held between this pair of driving portions in the direction X and rotated by the pair of driving portions, and a support portion arranged to surround the pair of driving portions and the mirror portion along the direction X and a direction Y (direction orthogonal to the direction X in the same plane). First end portions of this pair of driving portions are connected with the mirror portion on a first side of the direction X and a second side thereof, respectively. Second end portions of the pair of driving portions are fixed by the support portion located on sides opposite to the mirror portion in the direction X. The pair of driving portions are arranged such that a plurality of piezoelectric actuators extending in the direction Y are arranged in the direction X, and the plurality of piezoelectric actuators are continuously connected in a state where end portions of the plurality of piezoelectric actuators are bent. The first end portions of the pair of driving portions of this optical deflector are connected with the mirror portion on corners of the mirror portion on a first side of the direction Y while the second end portions of the pair of driving portions are connected with the support portion on corners of the support portion on the first side of the direction Y.

In the aforementioned Japanese Patent Laying-Open No. 2007-188073, there is disclosed a two-axis micro scanner including a horizontal driving portion, a pair of first cantilevers arranged on a first side of the horizontal driving portion in a direction X and extending in the direction X, a pair of second cantilevers arranged on a second side of the horizontal driving portion in the direction X and extending in the direction X, a pair of first connectors connecting each of the pair of first cantilevers and the horizontal driving portion, a pair of second connectors connecting each of the pair of second cantilevers and the horizontal driving portion, and a frame arranged to surround the aforementioned all components along the direction X and a direction Y. The pair of first cantilevers and the pair of second cantilevers of this two-axis micro scanner are fixed to the frame on sides opposite to the first connectors and the second connectors, respectively, in the direction X. One of the pair of first cantilevers and one of the pair of second cantilevers are arranged on a first straight line extending in the direction X while the other of the pair of first cantilevers and the other of the pair of second cantilevers are arranged on a second straight line extending in the direction X.

PRIOR ART Patent Document

Patent Document 1: Japanese Patent Laying-Open No. 2009-169290 Patent Document 2: Japanese Patent Laying-Open No. 2007-188073

SUMMARY

OF THE INVENTION Problems to be Solved by the Invention

However, in the optical deflector described in the aforementioned Patent Laying-Open No. 2009-169290, the first end portions and the second end portions of the pair of driving portions are connected with the mirror portion and the support portion in positions (the corners of the mirror portion and the corners of the support portion) deviating to the first side of the direction Y with respect to the center of the mirror portion, and hence there is such a problem that the mirror portion is so inclined that a second side of the mirror portion in the direction X is located below a first side of the mirror portion in the direction X due to the own weight of the mirror portion in a state where the pair of driving portions are not driven (non-driven state).

In the two-axis micro scanner described in the aforementioned Japanese Patent Laying-Open No. 2007-188073, one of the pair of first cantilevers and one of the pair of second cantilevers are arranged on the first straight line extending in the direction X while the other of the pair of first cantilevers and the other of the pair of second cantilevers are arranged on the second straight line extending in the direction X, and hence there is such a problem that the size of the two-axis micro scanner is increased in the direction X (first direction) by the total of the increased length of the pair of first cantilevers and the increased length of the pair of second cantilevers when the length of the pair of first cantilevers in the direction X and the length of the pair of second cantilevers in the direction X are increased in order to improve driving force.

The present invention has been proposed in order to solve the aforementioned problems, and an object of the present invention is to provide a vibrating mirror element capable of being inhibited from lengthening in a first direction and capable of inhibiting a mirror portion from inclining in a non-driven state.

Means for Solving the Problems and Effects of the Invention

A vibrating mirror element according to an aspect of the present invention includes a mirror portion, a deformable first driving portion, being cantilevered, including a first fixed end formed on a first side of a first direction beyond a first end portion of the mirror portion on the first side of the first direction and a first free end formed on a second side of the first direction beyond a second end portion of the mirror portion on the second side of the first direction, and linearly extending along the first direction, a first mirror support portion capable of supporting the mirror portion in a state where the mirror portion is inclined in response to an inclination of the first free end in driving, a deformable second driving portion, being cantilevered, including a second fixed end formed on the second side of the first direction beyond the second end portion of the mirror portion on the second side of the first direction and a second free end formed on the first side of the first direction beyond the first end portion of the mirror portion on the first side of the first direction, being point-symmetrical to the first driving portion with respect to the center of the mirror portion, and linearly extending along the first direction, and a second mirror support portion being point-symmetrical to the first mirror support portion with respect to the center of the mirror portion and capable of supporting the mirror portion in a state where the mirror portion is inclined in response to an inclination of the second free end in driving.

In the vibrating mirror element according to the aspect of the present invention, as hereinabove described, the second driving portion is configured to be point-symmetrical to the first driving portion with respect to the center of the mirror portion, and the second mirror support portion is configured to be point-symmetrical to the first mirror support portion with respect to the center of the mirror portion, whereby the mirror portion can be supported by the first driving portion and the second driving portion that are point-symmetrical to each other and the first mirror support portion and the second mirror support portion that are point-symmetrical to each other in plan view. Thus, the own weight of the mirror portion can be evenly distributed to the first mirror support portion and the second mirror support portion, and hence the mirror portion can be inhibited from inclining in a non-driven state. Furthermore, the first driving portion and the second driving portion are point-symmetrical to each other so that the residual stress of the first driving portion and the residual stress of the second driving portion can offset each other, if residual stress is accumulated in the first driving portion and the second driving portion. Thus, the mirror portion can be inhibited from inclining in the non-driven state also according to this structure.

Furthermore, in the aforementioned vibrating mirror element according to the aspect of the present invention, the first fixed end of the first driving portion linearly extending along the first direction is formed on the first side of the first direction beyond the first end portion of the mirror portion on the first side of the first direction, the first free end thereof is formed on the second side of the first direction beyond the second end portion of the mirror portion on the second side of the first direction, the second fixed end of the second driving portion linearly extending along the first direction is formed on the second side of the first direction beyond the second end portion of the mirror portion on the second side of the first direction, and the second free end thereof is formed on the first side of the first direction beyond the first end portion of the mirror portion on the first side of the first direction, whereby the first driving portion and the second driving portion can be formed to extend from a first side of the mirror portion in the first direction toward a second side thereof. In other words, the first driving portion and the second driving portion can be aligned in a direction (second direction) orthogonal to the first direction to hold the mirror portion therebetween in the second direction. Thus, the first driving portion and the second driving portion are not arranged on a common straight line extending in the first direction, and hence the overall size of the vibrating mirror element is not increased in the first direction by the sum of increases in the lengths of the first driving portion and the second driving portion even if the lengths of the first driving portion and the second driving portion in the first direction are increased. Consequently, the size of the vibrating mirror element in the first direction can be inhibited from increase.

Preferably in the aforementioned vibrating mirror element according to the aspect, residual stress is accumulated in the first driving portion and the second driving portion, and the residual stress of the first driving portion and the residual stress of the second driving portion being point-symmetrical to the first driving portion with respect to the center of the mirror portion offset each other, so that the mirror portion is arranged parallel to a plane passing through the first fixed end of the first driving portion and the second fixed end of the second driving portion in the non-driven state of the first driving portion and the second driving portion. According to this structure, the mirror portion can be easily inhibited from inclining with respect to the plane passing through the first fixed end of the first driving portion and the second fixed end of the second driving portion in the non-driven state even if residual stress is accumulated in the first driving portion and the second driving portion.

Preferably in the aforementioned vibrating mirror element according to the aspect, the first driving portion further includes a first connecting portion formed on the side of the first free end, the second driving portion further includes a second connecting portion formed on the side of the second free end, and the first mirror support portion is configured to be capable of supporting the mirror portion in a state where the mirror portion is inclined in response to an inclination of the first connecting portion while the second mirror support portion is configured to be capable of supporting the mirror portion in a state where the mirror portion is inclined in response to an inclination of the second connecting portion. According to this structure, the first mirror support portion can support the mirror portion while at least the inclination of the first connecting portion is maintained, and the second mirror support portion can support the mirror portion while at least the inclination of the second connecting portion is maintained.

Preferably in the aforementioned vibrating mirror element according to the aspect, the first mirror support portion, the second mirror support portion, and the mirror portion are configured to be located on the same plane in an inclined state when the first driving portion and the second driving portion are driven while being deformed. According to this structure, the mirror portion can be stably inclined while the inclination of the first mirror support portion inclined in response to the inclination of the first driving portion, the inclination of the second mirror support portion inclined in response to the inclination of the second driving portion, and the inclination of the mirror portion are maintained to be the same as each other.

Preferably in the aforementioned vibrating mirror element according to the aspect, the first driving portion and the second driving portion are configured to be deformed in warping directions opposite to each other to be driven. According to this structure, in the structure in which the first mirror support portion and the second mirror support portion are arranged to be point-symmetrical to each other, the first mirror support portion inclined in response to the deformation of the first driving portion and the second mirror support portion inclined in response to the deformation of the second driving portion can be easily inclined in the same direction, and hence the mirror portion supported by the first mirror support portion and the second mirror support portion can be easily inclined in a prescribed direction.

Preferably in the aforementioned vibrating mirror element according to the aspect, the first driving portion and the second driving portion are configured to be driven by voltage application, and voltages opposite in phase to each other are applied to the first driving portion and the second driving portion. According to this structure, the first driving portion and the second driving portion can be easily deformed to warp in directions different from each other. Thus, the first free end of the first driving portion and the second free end of the second driving portion can be displaced to the same extent in directions opposite to each other with reference to positions thereof in the non-driven state. Consequently, the first mirror support portion inclined in response to the inclination of the first free end of the first driving portion and the second mirror support portion being point-symmetrical to the first mirror support portion and inclined in response to the inclination of the second free end of the second driving portion can be inclined at substantially the same inclination angle. Therefore, the mirror portion supported by the first mirror support portion and the second mirror support portion can be inclined in the prescribed direction.



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Previous Patent Application:
Optical reflection element
Next Patent Application:
Vibrating mirror element and method for manufacturing vibrating mirror element
Industry Class:
Optical: systems and elements
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stats Patent Info
Application #
US 20120320441 A1
Publish Date
12/20/2012
Document #
13520411
File Date
12/24/2010
USPTO Class
3592241
Other USPTO Classes
International Class
02B26/10
Drawings
10



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