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Pressure sensor, especially pressure difference sensor


Title: Pressure sensor, especially pressure difference sensor.
Abstract: The pressure sensor of the invention includes at least one platform, at least one measuring membrane 30, and a transducer, wherein the measuring membrane comprises a semiconductor material, wherein the measuring membrane, enclosing a pressure chamber, is secured on the platform, wherein the measuring membrane is contactable with at least one pressure and is elastically deformable in a pressure-dependent manner, wherein the transducer provides an electrical signal dependent on deformation of the measuring membrane, wherein the platform has a membrane bed, on which the measuring membrane lies in the case of overload, in order to support the measuring membrane, wherein the membrane bed 21 has a glass layer 20, whose surface faces the measuring membrane and forms a wall of the pressure chamber, wherein the surface of the glass layer has a contour, which is suitable for supporting the measuring membrane 30 in the case of overload, characterized in that the contour of the membrane bed 21 is obtainable by a sagging of an unsupported region of a glass plate at increased temperature, due to the force of gravity on the unsupported region of the glass plate, and subsequent cooling of the glass plate. ... Browse recent Endress + Hauser Gmbh + Co. Kg patents
USPTO Applicaton #: #20120279310
Inventors: Timo Kober, Michael Philipps, Dieter Stolze, Anh Tuan Tham, Roland Werthschutzky



The Patent Description & Claims data below is from USPTO Patent Application 20120279310, Pressure sensor, especially pressure difference sensor.




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stats Patent Info
Application #
US 20120279310 A1
Publish Date
11/08/2012
Document #
13503804
File Date
10/07/2010
USPTO Class
73717
Other USPTO Classes
65107, 65 55
International Class
/
Drawings
3


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