Storage apparatus for storing semiconductor element or reticle

1. Technical Field

The present invention relates to storage apparatuses for storing semiconductor elements or reticles and, more particularly, to a storage apparatus having a flange integrally formed with a first cover thereof for storing a semiconductor element or a reticle.

2. Description of Related Art

In the rapidly developing semiconductor technology, optical lithography plays an important role and wherever pattern definition is conducted, optical lithography is requisite. As to the application of optical lithography relating to semiconductors, a designed circuit pattern is used to produce a light-transparent reticle. Basing on the principle of exposure, after a light passes through the reticle to be projected on a silicon wafer, the circuit pattern formed on the reticle can be exposed onto the silicon wafer. Since any dust (such as particles, powders or an organic matter) can adversely affect the quality of such projected pattern, the reticle used to produce the pattern on the silicon wafers is required with absolute cleanness. Thus, clean rooms are typically employed in general wafer processes for preventing particles in the air from defiling reticles and wafers. However, absolute dustless environment is inaccessible even in known clean rooms.

Hence, reticle storage apparatuses that facilitate preventing defilement are implemented in current semiconductor processes for the purpose of storage and transportation of reticles so as to ensure cleanness of the reticles. When such reticle storage apparatuses accommodate reticles for semiconductor processes, the reticles can be isolated from the atmosphere when being transferred and conveyed between stations, so as to be defended from defilement caused by impurities that induces deterioration. Similarly, when semiconductor element storage apparatuses accommodate semiconductor elements in semiconductor processes, the semiconductor elements can be isolated from the atmosphere when being transferred and conveyed between stations, so as to be secured from defilement caused by impurities that induces deterioration. Therefore, it is preferable to store reticles or semiconductor elements in storage apparatuses so as to ensure the cleanness and prevent contamination.

However, conventional storage apparatuses for storing semiconductor elements or reticles typically have complex structures. For example, a conventional storage apparatus is always composed of two covers and, for safe mechanical transportation, a flange alone or in company with a flange support has to be provided at a top of one of the covers for being help by a robot for transportation purpose. Further, a handle is also required for manual displacement. Besides, a board is needed for receiving a label tagged thereon while other structures may be necessary to accommodate other components.

Such flange, flange support, handle, board and other components on the storage apparatus for storing semiconductor elements or reticles can significantly increase the weight of the storage apparatus and consume increased assembling time. Besides, connectors are indispensable in the conventional storage apparatus for connecting the aforementioned components. Even with the most exquisite assembly, it is difficult to perpetually maintain tightness of the connectors. Consequently, when the connectors loosen, the connected components risk departing from each other. At a minimum then, the boards may fall off or lose identifying functions thereof; in a worst case situation, the flange, flange support or the handle may come off during the transportation of the storage apparatus for storing semiconductor elements or reticles, resulting in enhanced possibility of damage to the semiconductor elements or reticles.

Therefore, the present invention provides a storage apparatus having a flange integrally formed with a first cover thereof for storing a semiconductor element or a reticle to improve the current technology.

To remedy the problem of the prior arts, the present invention provides a storage apparatus for storing a semiconductor element or a reticle that is constructed from a first cover, a second cover and a flange. The first cover has a top and a plurality of laterals around the top. The second cover is to be assembled with the first cover to form an inner space for accommodating the reticle. The flange is on the first cover for being mechanically held and placed. The disclosed subject matter is characterized by that the flange is integrally formed with the first cover as a whole.

Thereupon, it is one objective of the present invention to provide a storage apparatus having a flange integrally formed with a first cover thereof for storing a semiconductor element or a reticle that is easy to be assembled so as to reduce consumption of assembling time.

It is another objective of the present invention to provide a storage apparatus having a flange integrally formed with a first cover thereof for storing a semiconductor element or a reticle that requires no connectors so as to reduce risks of damaged to components due to wear of the connectors.

It is another objective of the present invention to provide a storage apparatus having a flange integrally formed with a first cover thereof for storing a semiconductor element or a reticle that requires no connectors so as to reduce assembling time thereof.

It is another objective of the present invention to provide a storage apparatus having a flange integrally formed with a first cover thereof for storing a semiconductor element or a reticle that requires no connectors so as to reduce overall weight f the storage apparatus.

BRIEF DESCRIPTION OF THE DRAWINGS

The invention as well as a preferred mode of use, further objectives and advantages thereof, will best be understood by reference to the following detailed description of an illustrative embodiment when read in conjunction with the accompanying drawings, wherein:

FIG. 1 is a perspective view of a storage apparatus for storing a semiconductor element or a reticle according to one embodiment of the present invention;

FIGS. 2A and 2B provide alternative embodiments of the storage apparatus for storing a semiconductor element or a reticle according to the present invention;

FIGS. 3A to 3K provide alternative embodiments of the storage apparatus for storing a semiconductor element or a reticle according to the present invention, wherein different configurations of the flanges, flange supports and the top of the first cover are illustrated;

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