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Mems based optical coherence tomography probe

Mems based optical coherence tomography probe description/claims

This application claims priority from U.S. Provisional Patent Application No. 60/908,473 filed on Mar. 28, 2007 which is incorporated herein by reference in its entirety.

The present invention relates to biomedical imaging systems, and more particularly to a microelectromechanical systems (MEMS) based imaging systems.

Optical Coherence Tomography (OCT) is a high resolution optical imaging technique that enables sub-surface, tomographic imaging of a variety of materials. OCT imaging is based on coherence interferometry using a wide band light source, usually infrared light in the wavelength range of 750-1300 nanometers.

Light in an OCT system is typically split into a sample path and a reference path. The sample path is focused on the material or specimen to be imaged and the reference path provides a variable optical delay. Reflected light from the sample path and the reference path are combined in an interferometer and the interference signal detected thereby separating the non-coherent scattered light returning from the sample and the coherent non-scattered reflected light. The sampled signal is then used to construct an image of the scanned specimen.

MEMS devices including MEMS mirrors may be used to direct the light path in OCT imaging systems. Such MEMS devices are fragile and must be precisely positioned within a probe. Such MEMS devices may also require protection from clinical environments and electrostatic charges. It has heretofore been difficult to align and protect MEMS devices in a probe package. Further, MEMS devices must be electrically connected to external components. It has heretofore been difficult to provide electrical connections between a MEMS device and external components for control of the MEMS device.

Certain OCT applications require application specific or custom probes to perform various clinical functions. It has been inefficient to use a plurality of different probes for different applications.

The present invention provides a minimally invasive, non-destructive, high-resolution, three-dimensional MEMS based OCT probe that can be fabricated without requiring difficult processing steps.

An illustrative embodiment of the invention provides a micro-electromechanical system (MEMS) probe package including a first reflective element receiving a light beam directed into to the probe package and a second reflective element receiving light directed from the first reflective element. The second reflective element directs light in an optical path extending from the probe package. At least one of the reflective elements includes a MEMS mirror. An embodiment of the package is made with a monolithic housing having mounting surfaces formed therein for aligning the first reflective element with the second reflective element. The monolithic housing also includes a mounting surface for aligning at least one lens with at least one of the reflective elements.

While illustrative embodiments of the present invention are described as including a camera in a functional tip of a MEMS package, it should be understood that the illustrative embodiments of the invention also may include one or more cameras in the MEMS package itself regardless of whether a functional tip is used.

While the illustrative embodiments of the invention are described herein generally with respect to an OCT probe, it should be understood that the various embodiments of the invention can be used with a variety of other probe types such as, a hand held probe which may be optimized for examining an oral cavity, ear, nose, or skin for example.

Another embodiment of the invention provides a MEMS package including a housing having at least one MEMS device mounting surface and at least one optical component mounting surface for aligning at least one MEMS device with at least one optical device. The package also includes a removable functional module mounted externally to said housing

The features and advantages of the present invention will be better understood when reading the following detailed description, taken together with the following drawings in which:

FIG. 1 is a cross sectional view of a MEMS probe package having a laterally directed optical path;

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